Model-dependent emissivity correction in pyrometer temperature Charge of immediate thermal processing units
We report an optical, interferometric technique for measuring the temperature of semiconductor substrates all through heating or cooling, which is applicable in vacuum. The system circumvents a lot of…
The impact of temperature and roughness to the backside emissivity of Si wafers was studied. In situ measurements had been completed in two professional fast thermal processing methods. An experimental…
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A simulation of a whole fast thermal processing (RTP) technique is built to investigate the precision of assorted procedures for temperature Regulate. The process simulated was the chemical vapor deposition (CVD) of polycrystalline silicon over an oxide.
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